Micro Electro Mechanical Systems (MEMS) and Micro robots

Micro Electro Mechanical Systems (MEMS) and Micro robotics research spans design methodologies, physical investigations and manufacturing techniques involving various micro sensors, micro actuators and other microsystems. Selected applications include inertial sensor suites for control and guidance, miniature wall-climbing robots using micro/Nano-fiber adhesives; arrayed MEMS probe manipulators for tip-based Nano manufacturing, gas chemical sensor arrays for early warning systems, and ultra-compliant neural probes for brain-computer interfaces..

  • Micro Electro Mechanical Systems (MEMS) design and fabrication
  • micro and Nano robotic systems
  • implantable medical micro systems

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